| |
|
|
|
|
|
|
 |
| |
|
1. What is chiller? |
|
| Precision control of internal temperature is required for dry etcher, a major device to conduct etching on wafer among semiconductor manufacturing processes, and for other processing equipment such as sputter, and CVD. Chiller used as semiconductor equipment is based on the combination of refrigeration theory, going through evaporation, compression, condensation, and expansion, with control theory. It can satisfy the relevant requirements. |
|
2. Characteristics of chiller |
|
Depending on the composition of equipment, chiller can correspond to single channel or multiple channels such as dual and triple channels. The device has precision operation features, and excellent controlling capability. |
|
3. Types of Chillers |
|
|
|
| |
|
|
|
BCU (Brine Chilling Unit) TYPE